Recently, Bopixel successfully delivered a deep ultraviolet (DUV) CPC camera customized for semiconductor dark-field imaging inspection, marking a significant breakthrough in China's semiconductor imaging core components. With outstanding technical performance and innovative design, this product has achieved domestic top-tier and globally leading technological standards.
In semiconductor manufacturing, dark-field imaging equipment is a core tool for FAB process control, playing a vital role in improving chip yield and product quality. This DUV CPC camera adopts a unique design and imaging principle, combined with a vacuum-sealed chamber and water/air-cooled temperature control, ensuring high-speed imaging while maintaining sensitivity and stability. It can rapidly and precisely capture microscopic defects on wafer surfaces, making it China’s first true dark-field DUV CPC camera.
For a long time, dark-field CPC cameras were monopolized and restricted for export by foreign manufacturers, creating a "bottleneck" dilemma. Bopixel’s successful delivery of this DUV CPC camera breaks this foreign monopoly, achieving a groundbreaking domestic milestone (0→1 breakthrough).
The DUV CPC camera has passed strict EMVA 1288 protocol testing and customer validation. In terms of performance metrics—such as resolution, signal-to-noise ratio (SNR), and dynamic range—it meets or exceeds customer expectations. Additionally, its stability, reliability, and ease of use have been highly praised by clients.
Bopixel implemented deep innovations in multiple technical areas, including circuit and structural design, sensor optimization, and signal processing, ensuring exceptional performance under complex operating conditions. The project progressed on schedule, demonstrating the company’s strong technical capabilities and project management expertise.
Bopixel’s successful delivery of this dark-field CPC camera holds strategic significance for advancing the localization of semiconductor inspection equipment in China. It not only meets the urgent needs of domestic semiconductor manufacturers—reducing reliance on imported equipment—but also positions China to compete in the global market.
With the rapid development of China’s semiconductor industry, demand for high-end domestic imaging components continues to grow. Bopixel will further increase R&D investment, continuously enhancing product performance to support the autonomy and security of China’s semiconductor supply chain.